Gamma and electron beam irradiation effects on the resistance of micromachined polycrystalline silicon beams
| Autor: | Wang, Lei, Tang, Jieying, Huang, Qing-An |
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| Zdroj: | In Sensors & Actuators: A. Physical April 2012 177:99-104 |
| Databáze: | ScienceDirect |
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