Numerical and analytical modelling of holed MEMS resonators
| Autor: | Civet, Y., Casset, F., Carpentier, J.F., Basrour, S. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical October 2012 186:230-235 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Civet, Y., Casset, F., Carpentier, J.F., Basrour, S. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical October 2012 186:230-235 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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