Micron-scale polymer–metal cantilever actuators fabricated by focused ion beam
| Autor: | Lee, C.C., Alici, G., Spinks, G.M., Proust, G., Cairney, J.M. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2011 172(2):462-470 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Lee, C.C., Alici, G., Spinks, G.M., Proust, G., Cairney, J.M. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2011 172(2):462-470 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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