Influences of perforation ratio in characteristics of capacitive micromachined ultrasonic transducers in air
| Autor: | Cha, Bu-Sang, Lee, Seung-Mok, Kanashima, Takeshi, Okuyama, Masanori, Tanaka, Tsunehisa |
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| Zdroj: | In Sensors & Actuators: A. Physical 2011 171(2):191-198 |
| Databáze: | ScienceDirect |
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