NEG thin films for under controlled atmosphere MEMS packaging
| Autor: | Tenchine, Lionel, Baillin, Xavier, Faure, Christel, Nicolas, Pierre, Martinez, Eugénie, Papon, Anne-Marie |
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| Zdroj: | In Sensors & Actuators: A. Physical December 2011 172(1):233-239 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect