Controlling the initial phase of PECVD growth of vertically aligned carbon nanofibers on TiN
| Autor: | Ghavanini, Farzan A., Lopez-Damian, Maria, Rafieian, Damon, Svensson, Krister, Lundgren, Per, Enoksson, Peter |
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| Zdroj: | In Sensors & Actuators: A. Physical December 2011 172(1):347-358 |
| Databáze: | ScienceDirect |
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