AFM characterization of nanopositioner in-plane stiffnesses
| Autor: | Yang, Seung Ho, Kim, Yongsik, Purushotham, Kavuri Premsagar, Yoo, Jae-Myung, Choi, Young-Man, Dagalakis, Nicholas |
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| Zdroj: | In Sensors & Actuators: A. Physical 2010 163(1):383-387 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect