Wear mechanisms and friction parameters for sliding wear of micron-scale polysilicon sidewalls
| Autor: | Alsem, D.H., van der Hulst, R., Stach, E.A., Dugger, M.T., De Hosson, J.Th.M., Ritchie, R.O. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2010 163(1):373-382 |
| Databáze: | ScienceDirect |
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