Atomic layer deposition enabled interconnect technology for vertical nanowire arrays
| Autor: | Cheng, Jen-Hau, Seghete, Dragos, Lee, Myongjai, Schlager, John B., Bertness, Kris A., Sanford, Norman A., Yang, Ronggui, George, Steven M., Lee, Y.C. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2011 165(1):107-114 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect