Ellipsometry study of the adsorbed surfactant thickness on Si{1 1 0} and Si{1 0 0} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH
| Autor: | Tang, Bin, Pal, Prem, Gosalvez, M.A., Shikida, M., Sato, K., Amakawa, H., Itoh, S. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2009 156(2):334-341 |
| Databáze: | ScienceDirect |
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