Effect of post-release sidewall morphology on the fracture and fatigue properties of polycrystalline silicon structural films
| Autor: | Alsem, D.H., Boyce, B.L., Stach, E.A., Ritchie, R.O. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2008 147(2):553-560 |
| Databáze: | ScienceDirect |
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