Levitation compensation method for dynamic electrostatic comb-drive actuators
| Autor: | Timpe, S.J., Hook, D.A., Dugger, M.T., Komvopoulos, K. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2008 143(2):383-389 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Timpe, S.J., Hook, D.A., Dugger, M.T., Komvopoulos, K. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2008 143(2):383-389 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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