Scanning electron microscopy for vacuum quality factor measurement of small-size MEMS resonators
| Autor: | Gilles, J.P., Megherbi, S., Raynaud, G., Parrain, F., Mathias, H., Leroux, X., Bosseboeuf, A. |
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| Zdroj: | In Sensors & Actuators: A. Physical July-August 2008 145-146:187-193 |
| Databáze: | ScienceDirect |
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