Silicon shadow mask fabrication for patterned metal deposition with microscale dimensions using a novel corner compensation scheme
| Autor: | Apanius, Matt, Kaul, Pankaj B., Abramson, Alexis R. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2007 140(2):168-175 |
| Databáze: | ScienceDirect |
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