Vertically moving micromirror for detectors in the mid infrared
| Autor: | Quack, Niels, Blunier, Stefan, Dual, Jurg, Arnold, Martin, Felder, Ferdinand, Ebneter, Christian, Rahim, Mohamed, Zogg, Hans |
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| Zdroj: | In Sensors & Actuators: A. Physical 2008 143(1):29-33 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect