Characteristics of a commercially available silicon-on-insulator MEMS material
| Autor: | Miller, David C., Boyce, Brad L., Dugger, Michael T., Buchheit, Thomas E., Gall, Ken |
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| Zdroj: | In Sensors & Actuators: A. Physical 2007 138(1):130-144 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect