Micro torsion mirror actuated by compound electrostatic driving structure
| Autor: | Wu, W.G., Chen, Q.H., Yan, G.Z., Yin, D.Q., Chen, Z.Y., Hao, Y.L., Xu, A.S., Wang, Y.Y. |
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| Zdroj: | In Sensors & Actuators: A. Physical 15 April 2007 135(2):758-764 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect