A low loss flexural plate wave (FPW) device through enhanced properties of sol–gel PZT (52/48) thin film and stable TiN-Pt bottom electrode
| Autor: | Sekhar, Praveen Kumar, Akella, Sriram, Bhansali, Shekhar |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2006 132(1):376-384 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect