Piezoelectric aluminum nitride MEMS annular dual contour mode filter
| Autor: | Stephanou, Philip J., Piazza, Gianluca, White, Carolyn D., Wijesundara, Muthu B.J., Pisano, Albert P. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2007 134(1):152-160 |
| Databáze: | ScienceDirect |
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