A high-temperature thermopile fabrication process for thermal flow sensors
| Autor: | Buchner, Rainer, Sosna, Christoph, Maiwald, Marcus, Benecke, Wolfgang, Lang, Walter |
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| Zdroj: | In Sensors & Actuators: A. Physical 2006 130:262-266 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect