Simulation of SiO 2-based piezoresistive microcantilevers
| Autor: | Chivukula, Venkata, Wang, Ming, Ji, Hai-Feng, Khaliq, Abdul, Fang, Ji, Varahramyan, Kody |
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| Zdroj: | In Sensors & Actuators: A. Physical 2006 125(2):526-533 |
| Databáze: | ScienceDirect |
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