Single-crystal silicon micromirror array with polysilicon flexures
| Autor: | Kudrle, T.D. *, Wang, C.C., Bancu, M.G., Hsiao, J.C., Pareek, A., Waelti, M., Kirkos, G.A., Shone, T., Fung, C.D., Mastrangelo, C.H. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2005 119(2):559-566 |
| Databáze: | ScienceDirect |
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