Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane
| Autor: | Tiggelaar, R.M. *, Male, P. van, Berenschot, J.W., Gardeniers, J.G.E., Oosterbroek, R.E., Croon, M.H.J.M. de, Schouten, J.C., Berg, A. van den, Elwenspoek, M.C. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2005 119(1):196-205 |
| Databáze: | ScienceDirect |
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