Transient capacitance measurement of MEM capacitor
| Autor: | Nieminen, Heikki *, Hyyryläinen, Jari, Veijola, Timo, Ryhänen, Tapani, Ermolov, Vladimir |
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| Zdroj: | In Sensors & Actuators: A. Physical 2005 117(2):267-272 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Nieminen, Heikki *, Hyyryläinen, Jari, Veijola, Timo, Ryhänen, Tapani, Ermolov, Vladimir |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2005 117(2):267-272 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect