Dynamics of CMOS-based thermally actuated cantilever arrays for force microscopy
| Autor: | Volden, T., Zimmermann, M., Lange, D., Brand, O., Baltes, H. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2004 115(2):516-522 |
| Databáze: | ScienceDirect |
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