Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching
| Autor: | Waits, C.M., Morgan, B., Kastantin, M., Ghodssi, R. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2005 119(1):245-253 |
| Databáze: | ScienceDirect |
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