Realisation of very high voltage electrode–nozzle systems for MEMS
Autor: | Paine, M.D., Gabriel, S., Schabmueller, C.G.J., Evans, A.G.R. |
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Zdroj: | In Sensors & Actuators: A. Physical 2004 114(1):112-117 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Paine, M.D., Gabriel, S., Schabmueller, C.G.J., Evans, A.G.R. |
---|---|
Zdroj: | In Sensors & Actuators: A. Physical 2004 114(1):112-117 |
Databáze: | ScienceDirect |
Externí odkaz: |