Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process
| Autor: | Rogge, T., Rummler, Z., Schomburg, W.K. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2004 110(1):206-212 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Rogge, T., Rummler, Z., Schomburg, W.K. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2004 110(1):206-212 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect