Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators
| Autor: | Piazza, Gianluca, Abdolvand, Reza, Ho, Gavin K., Ayazi, Farrokh ∗ |
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| Zdroj: | In Sensors & Actuators: A. Physical 2004 111(1):71-78 |
| Databáze: | ScienceDirect |
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