Fabrication and characterization of thick porous silicon layers for rf circuits

Autor: You, S.Z., Long, Y.F., Xu, Y.S., Zhu, Z.Q., Shi, Y.L., Lai, Z.S., Li, Z.F., Lu, W., Li, A.Z.
Zdroj: In Sensors & Actuators: A. Physical 2003 108(1):117-120
Databáze: ScienceDirect
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