Fabrication and characterization of torsion-mirror actuators for optical networking applications

Autor: Wu, W.G., Li, D.C., Sun, W., Hao, Y.L., Yan, G.Z., Jin, S.J.
Zdroj: In Sensors & Actuators: A. Physical 2003 108(1):175-181
Databáze: ScienceDirect
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