A bulk micromachined silicon thermopile with high sensitivity
| Autor: | Allison, S.C., Smith, R.L., Howard, D.W., González, C., Collins, S.D. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2003 104(1):32-39 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Allison, S.C., Smith, R.L., Howard, D.W., González, C., Collins, S.D. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2003 104(1):32-39 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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