New digital readout electronics for capacitive sensors by the example of micro-machined gyroscopes
| Autor: | Gaißer, A., Geiger, W., Link, T., Merz, J., Steigmajer, S., Hauser, A., Sandmaier, H., Lang, W., Niklasch, N. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2002 97:557-562 |
| Databáze: | ScienceDirect |
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