Direct microfabrication using an X-ray micro-beam
| Autor: | Katoh, Takanori, Zhang, Yanping, Kagoshima, Yasushi, Tsusaka, Yoshiyuki, Matsui, Junji |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2002 97:725-728 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Katoh, Takanori, Zhang, Yanping, Kagoshima, Yasushi, Tsusaka, Yoshiyuki, Matsui, Junji |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 2002 97:725-728 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect