Innovative concept for the fabrication of micromechanical sensor and actuator devices using selectively metallized polymers
| Autor: | Eberhardt, W., Gerhäußer, Th., Giousouf, M., Kück, H., Mohr, R., Warkentin, D. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2002 97:473-477 |
| Databáze: | ScienceDirect |
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