Fabrication of single-crystal Si cantilever array
| Autor: | Saya, Daisuke *, Fukushima, Kimitake, Toshiyoshi, Hiroshi, Hashiguchi, Gen, Fujita, Hiroyuki, Kawakatsu, Hideki |
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| Zdroj: | In Sensors & Actuators: A. Physical 2002 95(2):281-287 |
| Databáze: | ScienceDirect |
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