Fabrication of single-crystal Si cantilever array

Autor: Saya, Daisuke *, Fukushima, Kimitake, Toshiyoshi, Hiroshi, Hashiguchi, Gen, Fujita, Hiroyuki, Kawakatsu, Hideki
Zdroj: In Sensors & Actuators: A. Physical 2002 95(2):281-287
Databáze: ScienceDirect