The first low voltage, low noise differential silicon microphone, technology development and measurement results
| Autor: | Rombach, Pirmin *, Müllenborn, Matthias, Klein, Udo, Rasmussen, Kurt |
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| Zdroj: | In Sensors & Actuators: A. Physical 2002 95(2):196-201 |
| Databáze: | ScienceDirect |
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