Etching characteristics and mechanical properties of a-SiC:H thin films
| Autor: | Schmid, U. *, Eickhoff, M., Richter, Ch., Krötz, G., Schmitt-Landsiedel, D. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2001 94(1):87-94 |
| Databáze: | ScienceDirect |
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