Chip-size-packaged silicon microphones
| Autor: | Müllenborn, M. *, Rombach, P., Klein, U., Rasmussen, K., Kuhmann, J.F., Heschel, M., Gravad, M.Amskov, Janting, J., Branebjerg, J., Hoogerwerf, A.C., Bouwstra, S. |
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| Zdroj: | In Sensors & Actuators: A. Physical 2001 92(1):23-29 |
| Databáze: | ScienceDirect |
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