Direct writing for three-dimensional microfabrication using synchrotron radiation etching
| Autor: | Katoh, Takanori *, Nishi, Nobuyoshi, Fukagawa, Masafumi, Ueno, Hiroshi, Sugiyama, Susumu |
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| Zdroj: | In Sensors & Actuators: A. Physical 2001 89(1):10-15 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect