Hetero-micromachining of epitaxial III/V compound semiconductors
| Autor: | Peiner, Erwin *, Fricke, Klaus, Behrens, Ingo, Bakin, Andrey, Schlachetzki, Andreas |
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| Zdroj: | In Sensors & Actuators: A. Physical 2000 85(1):324-329 |
| Databáze: | ScienceDirect |
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