Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range

Autor: Reynolds, J.Kurth *, Catling, David, Blue, Randel C, Maluf, Nadim I, Kenny, Thomas
Zdroj: In Sensors & Actuators: A. Physical 2000 83(1):142-149
Databáze: ScienceDirect