Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range
Autor: | Reynolds, J.Kurth *, Catling, David, Blue, Randel C, Maluf, Nadim I, Kenny, Thomas |
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Zdroj: | In Sensors & Actuators: A. Physical 2000 83(1):142-149 |
Databáze: | ScienceDirect |
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