Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films
| Autor: | Rahman, Mohd Azam Abdul, Goh, Boon Tong, Chiu, Wee Siong, Haw, Choon Yian, Mahmood, Mohamad Rusop, Khiew, Poi Sim, Rahman, Saadah Abdul |
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| Zdroj: | In Vibrational Spectroscopy January 2018 94:22-30 |
| Databáze: | ScienceDirect |
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