FTIR and Raman study of rapid thermal annealing and oxidation effects on structural properties of silicon-rich SixC1-x thin films deposited by R.F co-sputtering

Autor: El khalfi, Abdel-ilah, Ech-chamikh, Elmaati, Ijdiyaou, Youssef, Azizan, Mustapha, Essafti, Abdelhadi, Nkhaili, Lahcen, El Kissani, Abdelkader, Tomasella, Eric
Zdroj: In Vibrational Spectroscopy March 2017 89:44-48
Databáze: ScienceDirect
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