FTIR and Raman study of rapid thermal annealing and oxidation effects on structural properties of silicon-rich SixC1-x thin films deposited by R.F co-sputtering
Autor: | El khalfi, Abdel-ilah, Ech-chamikh, Elmaati, Ijdiyaou, Youssef, Azizan, Mustapha, Essafti, Abdelhadi, Nkhaili, Lahcen, El Kissani, Abdelkader, Tomasella, Eric |
---|---|
Zdroj: | In Vibrational Spectroscopy March 2017 89:44-48 |
Databáze: | ScienceDirect |
Externí odkaz: |