Laser machining of free-standing silicon nitride membranes
| Autor: | Xie, Xitong, Nikbakht, Roghayeh, Couillard, Martin, St-Gelais, Raphael, Weck, Arnaud |
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| Zdroj: | In Journal of Materials Processing Tech. September 2023 318 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect