Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path
| Autor: | Kwon, Kui-Kam, Song, Ki Young, Seo, Jae Min, Chu, Chong Nam, Ahn, Sung-Hoon * |
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| Zdroj: | In Journal of Materials Processing Tech. May 2021 291 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect