High aspect ratio channel fabrication with near-infrared laser-induced backside wet etching
| Autor: | Kwon, Kui-Kam, Kim, Haan, Kim, Taekyum, Chu, Chong Nam * |
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| Zdroj: | In Journal of Materials Processing Tech. April 2020 278 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect