Direct writing of metal film via sputtering of micromachined electrodes
| Autor: | Abdul-Wahed, Ahmed M., Roy, Anindya L., Xiao, Zhiming, Takahata, Kenichi |
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| Zdroj: | In Journal of Materials Processing Tech. December 2018 262:403-410 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect