Development and characterization of ultra high aspect ratio microstructures made by ultra deep X-ray lithography
| Autor: | Nazmov, Vladimir, Reznikova, Elena, Mohr, Juergen, Schulz, Joachim, Voigt, Anja |
|---|---|
| Zdroj: | In Journal of Materials Processing Tech. November 2015 225:170-177 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect